Treatment device, laser annealing device, manufacturing apparatus, and manufacturing apparatus for flat display device
US6270619A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 1999 |
| Grant date | Aug 7, 2001 |
| Priority date | — |
| Expiry date | Jan 13, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A film forming device in a substrate manufacturing apparatus a stage section on which a cassette storing a plurality of glass substrates is mounted. A treatment section for subjecting the substrate to a predetermined treatment is arranged to oppose the stage section. A washing section for washing the substrate is arranged near the stage section and the treatment section and deviated from a space between the stage section and the treatment section in a second direction crossing a first direction passing through the stage section and the treatment section. A transfer robot is arranged between the stage section and the treatment section. The transfer robot transfers the substrate between the stage section, treatment section, and washing section and loads the substrate, washed in the washing section, directly into the treatment section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.