Method for making a micromachine
US6271145A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 30, 1999 |
| Grant date | Aug 7, 2001 |
| Priority date | — |
| Expiry date | Nov 30, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/1017
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for making a micromachine, which includes a spherical body and a spherical shell surrounding said spherical body, comprising forming a victim layer on said spherical body to coat said spherical body, forming a function layer on said victim layer, said function layer including at least one conductive material pattern and/or insulating material layer, forming a structure layer of insulating material to coat said spherical body on which said function layer is formed, forming etching bores extending from the outer surface of said structure layer to said victim layer, and introducing gaseous etchant into said etching bores to remove said victim layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.