Three dimensional micromachined electromagnetic device and associated methods
US6271802A · kind A · utility
36Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 13, 1998 |
| Grant date | Aug 7, 2001 |
| Priority date | — |
| Expiry date | Apr 13, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01Q21/067
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A micro-electromagnetic device having a three dimensional structure is formed using laser chemical vapor deposition on a conductive surface. Arrays of electromagnetic devices may be formed. Various techniques for facilitating deposition on the conductive surface may be used. A helical antenna for use in the THz region may be formed in accordance with the laser chemical vapor deposition. The antenna is preferably formed on a bolometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.