Integrated silicon profilometer and AFM head
US6272907A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 1999 |
| Grant date | Aug 14, 2001 |
| Priority date | — |
| Expiry date | Jan 19, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T24/44923
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A topographic head for profilometry and AFM supports a central paddle by coaxial torsion bars projecting inward from an outer frame. A tip projects from the paddle distal from the bars. The topographic head's frame, bars and paddle are monolithically fabricated by micromachining from a semiconductor wafer. The torsion bars preferably include an integrated paddle rotation sensor. The topographic head may be carried on an XYZ stage for X, Y and Z axis translation. In a preferred embodiment, the XYZ stage is also monolithically fabricated by micromachining from a semiconductor wafer with a fixed outer base that is coupled to an X-axis stage via a plurality of flexures, and with the X-axis stage supporting a Y-axis stage also via a plurality of flexures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.