Patent · US Expired

Micromechanical component

US6272926A · kind A · utility

36Cited by

4References

19Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Michael Fehrenbach · Rehoboth Beach, US
Dietrich Schubert · Reutlingen, DE
Heinz-Georg Vossenberg · Pfullingen, DE

Key dates

Filing date	Apr 16, 1999
Grant date	Aug 14, 2001
Priority date	—
Expiry date	Apr 16, 2019

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical component, in particular an acceleration sensor, includes a substrate, at least one spring element and at least one seismic mass. The spring element is joined at a first end to the substrate and at a second end to the mass, and the rigidity of the spring element is set such that a movement of the mass relative to the substrate can be caused by an acceleration parallel to a surface of the substrate. For the spring element, provision is made for a spring limit stop which limits a deformation of the spring element in response to an acceleration parallel to the surface of the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.