Piezoelectric actuator for a servo drive, servo drive with a piezoelectric actuator and method of producing a piezoelectric actuator

US6274967A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Claus Zumstrull · Regenstauf, DE
• Wilhelm Frank · Echterdingen, DE
• Andreas Voigt · Regensburg, DE
• Carsten Schuh · Baldham, DE
• Gunter Lewentz · Regensburg, DE

Key dates

• Filing date: Apr 22, 1999
• Grant date: Aug 14, 2001
• Expiry date: Apr 22, 2019

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F02M2200/26

Abstract

A servo drive includes a piezoelectric actuator contained in a drive housing. The actuator has an actuator stack surrounded by a hollow cylindrical spring element and an actuator casing disposed in the spring element. The spring element is clamped, together with the actuator stack, between an actuator cap and an actuator base. An elastic compound fills gaps between the drive housing and the spring element as well as between the spring element and the actuator casing, and damps an actuator motion. A piezoelectric actuator for the servo drive and a method of producing the piezoelectric actuator are also provided.