Gas passage with selectively acting penetration surface and process for producing the penetration surface

US6277177A · kind A · utility

Assignee

• LEYBOLD VAKUUM GmbH · DE

Inventors

• Werner Grosse Bley · Bonn, DE
• Thomas Böhm · Zorneding, DE
• Ulrich Döbler · Wermelskirchen, DE
• Manfred Lacher · Mainz, DE
• Thomas Zetterer · Bad Kreuznach, DE

Key dates

• Filing date: Dec 8, 1997
• Grant date: Aug 21, 2001
• Expiry date: Dec 8, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/205
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A gas passage (1) with a selectively acting penetration surface consisting of quartz, quartz glass, Pyrex glass or the like; in order to provide penetration surfaces which are relatively thin on the one hand but will withstand relatively great pressure differences on the other, it is proposed that the selectively acting penetration surface take the form of a plurality of adjacent windows (5).