Purification of electronic specialty gases by vapor phase transfilling
US6277246A · kind A · utility
1Cited by
36References
14Claims
0Family size
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Key dates
| Filing date | Jan 28, 1999 |
| Grant date | Aug 21, 2001 |
| Priority date | — |
| Expiry date | Jan 28, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01C1/024
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A system and method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a factor of at least 1000 and decreases the metallic impurity levels in the resulting condensate. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or metal impurities.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.