Antisoiling coatings for antireflective surfaces and methods of preparation
US6277485A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1998 |
| Grant date | Aug 21, 2001 |
| Priority date | — |
| Expiry date | Jan 27, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31667
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An antisoiling coating for an antireflective surface, particularly the outer surface of an antireflective film stack, wherein the antisoiling coating includes a fluorinated siloxane, preferably prepared by applying a coating composition of a fluorinated silane, having a number average molecular weight of at least about 1000, of the following formula: EQU R.sub..function. --[--R.sup.1 --SiY.sub.3-x R.sup.2.sub.x ].sub.y (I) wherein: R.sub..function. is a monovalent or divalent polyfluoropolyether group; R.sup.1 is a divalent alkylene group, arylene group, or combinations thereof, R.sup.2 is a lower alkyl group; Y is a halide, a lower alkoxy group, or a lower acyloxy group; x is 0 or 1; and y is 1 or 2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.