Radiation detection device and method of making the same
US6278118A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 1999 |
| Grant date | Aug 21, 2001 |
| Priority date | — |
| Expiry date | Feb 10, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/20189
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
Light-receiving devices are two-dimensionally arranged on a substrate, bonding pads electrically connected to the light-receiving devices in the respective rows or columns via signal lines are arranged on the outer periphery of the substrate, and a protective passivation film is disposed on the light-receiving devices and signal lines, thereby forming a light-receiving device array. A scintillator made of columnar crystals of CsI is deposited on the light-receiving surface of the light-receiving device array, whereas a protective film in which an Al inorganic film is held between organic films, made of Parylene is laminated thereon. The outer periphery of the protective film is cut at a position where the bonding pads are exposed, and is brought into close contact with the passivation film with the aid of the coating resin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.