Image sensor shielding

US6278169A · kind A · utility

Assignee

• Analog Devices, Inc. · US

Inventors

• Mark Sayuk · Somerville, US
• Steve Decker · Cambridge, US
• Dahong Qian · Westford, US
• Anne Maria Deignan · Limerick, IE
• Dave Bain · Adare, IE

Key dates

• Filing date: Nov 9, 1998
• Grant date: Aug 21, 2001
• Expiry date: Nov 9, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F39/8057

Abstract

A method of shielding light from rows and columns of an array of pixels of a CMOS image sensor includes the steps of: providing a first layer of metal shielding above the rows and columns of the array; and providing a second layer of metal shielding above the first layer. The method further includes forming slots within each of the first and second layers of metal shielding, such that the slots of the first layer are misaligned with the slots of the second layer. A light shield for shielding columns and rows of an array of pixels in a CMOS image sensor includes a first metal layer located above the columns and rows of the array, and a second metal layer located above the first metal layer. Each of the first and second metal layers includes slots. The slots are formed such that the slots of the first layer are misaligned with the slots of the second layer.