Patent · US Expired

Apparatus for inspecting land-attached circuit board

US6278797A · kind A · utility

16Cited by
5References
32Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 25, 1998
Grant dateAug 21, 2001
Priority date
Expiry dateSep 25, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/311
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An inspection beam such as laser beam is scanned two-dimensionally on an inspection surface of a circuit board with a plurality of lands while allowing its reflected beam from the inspection surface to be received by a beam receiving section. The beam receiving section is formed by a device, such as a semiconductor position sensitive detector, which is capable of producing an output which varies according to a reflected beam brightness and reflected beam receiving position (which reflects the height level of the reflection surface). On the basis of the output of the beam receiving section, reflected beam brightness information and height level information at respective positions on the inspection surface are prepared. From the reflected beam brightness information at the respective positions, an existing region of each of the lands on the inspection surface can be fixed. From the height level information at the respective positions within the thus fixed land existing region, the land height level can be fixed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.