Semiconductor device evaluation apparatus
US6281697A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 1999 |
| Grant date | Aug 28, 2001 |
| Priority date | — |
| Expiry date | Jun 23, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/315
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device evaluation apparatus is provided with a test board. A print wiring is provided at a first surface of the test board on which a semiconductor device is mounted. A terminal of the semiconductor device is connected to the print wiring. A power circuit is provided at a second surface opposite to the first surface of the test board. The power circuit is connected to the print wiring and actuates the semiconductor device. The apparatus is also provided with a magnetic field detector arranged above the print wiring and detects a magnetic field generated from the print wiring. Further, the apparatus is provided with a current detector detecting a value of current carried through the print wiring based on the magnitude of the magnetic field detected by the magnetic field detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.