Stacked piezoelectric actuators to control waveguide phase shifters and method of manufacture thereof

US6281766A · kind A · utility

Assignee

• Motorola, Inc. · US

Inventors

• Hugh R. Malone · Phoenix, US
• Deborah Sue Dendy · Tempe, US
• Dean Lawrence Cook · Mesa, US
• James R. Phillips · New York, US
• Richard S. Kommrusch · Fountain Hills, US

Key dates

• Filing date: Jun 1, 1998
• Grant date: Aug 28, 2001
• Expiry date: Jun 1, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01P1/182
• WIPO field: Telecommunications
• WIPO sector: Electrical engineering

Abstract

Waveguide phase shifter (200, FIG. 2 and 300, FIG. 3) uses piezoelectric ceramics to implement a voltage variable actuator (270, 370) for moving at least one dielectric vane (255, 355) relative to a reference surface (206, 306) in a waveguide cavity (285, 385). In this manner, the phase shift in waveguide phase shifters (200, 300) is controlled. In one embodiment, actuator (270) comprises first piezoelectric wafer (210), second piezoelectric wafer (220), first metallic layer (230), second metallic layer (240), third metallic layer (250), mating surface (272) and spacer (265). Actuator (270) uses a stack of piezoelectric materials to establish a lever arm mechanism to establish vertical movement (294) and move dielectric vane (255). Actuator (370) uses a stack of piezoelectric materials to establish vertical movement (394) and move dielectric vane (355). Waveguide phase shifters (200, 300) are used in phased array antenna (400) operating at microwave frequencies.