Micromachined device with enhanced dimensional control
US6282960A · kind A · utility
91Cited by
14References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 16, 1998 |
| Grant date | Sep 4, 2001 |
| Priority date | — |
| Expiry date | Jun 16, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined device is provided that establishes select dimensional relationships between micromachined structures to achieve correlation in dimensional variation among these structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.