Micro pump and method of producing the same
US6283730A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 16, 1999 |
| Grant date | Sep 4, 2001 |
| Priority date | — |
| Expiry date | Nov 16, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B43/043
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A micro pump is made compact and can prevent members constituting the micro pump from being chemically reacted with a working fluid, and a method of producing the same. After each of substrates constituting the micro pump is formed by a member containing a silicone as a main composition and a plurality of metal membranes are formed on a whole of a bonding surface of each of the substrates so as to form bonding surfaces, the bonding surfaces are cleaned, and the bonding surfaces are opposed to each other under a vacuum condition, overlapped, heated and pressed so as to be bonded. The valve portion has a beam and a protrusion for sealing as provided in the valve side, whereby a pressure applied to the protrusion becomes smaller than the bonding pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.