Patent · US Expired

Penning vacuum meter

US6285192A · kind A · utility

5Cited by
3References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 14, 1999
Grant dateSep 4, 2001
Priority date
Expiry dateOct 14, 2019

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01L21/34
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

The invention relates to a Penning vacuum meter (1), comprising a cathode and an anode. According to the invention, the cathode (11) consists at least mainly of titanium in order to avoid the detrimental effects of the cathode disintegrating.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.