Protective system for integrated circuit (IC) wafers retained within containers designed for storage and shipment
US6286684A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2000 |
| Grant date | Sep 11, 2001 |
| Priority date | — |
| Expiry date | Jul 21, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67396
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A container for integrated circuit wafers provides protection for the wafers from mechanical shock and electrical charges. The wafers are mechanically protected by top and bottom cushions and side cushions. The top and bottom cushions each have foam within a membrane or film enclosure. The enclosure has openings so as to allow gas to pass in and out. The side cushions have resilient projections that protect the edges of the wafers. The side cushions are interposed between flanges of the top and bottom cushions. The individual wafers are separated from each other by leaf separators made of film. The film for the separators and the top and bottom cushions can be the same type. The film has a first layer made of a polymer with dissipative material therein and a second layer made of a polymer without the dissipative material. The first and second layers are coupled together. The insulating layer is placed into contact with a circuit side of the wafer. The dissipative material can be carbon. The container has a grounding stud in a wall. The grounding stud contacts the film on the inside of the container and can contact a ground on the exterior of the container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.