Magnetic head slider manufacturing method
US6287475A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 26, 1998 |
| Grant date | Sep 11, 2001 |
| Priority date | — |
| Expiry date | May 26, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49048
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
When forming a floating-type magnetic head slider for a hard disk drive or the like using dry etching, a method for manufacturing the magnetic head slider provides a method for adhering the slider being processed to an appropriate processing fixture, and when a plurality of magnetic head sliders are being processed at one time, a row (bar) array of sliders that is prepared beforehand is adhered to a metal or ceramic base, after which a dry etching method is used to form the air bearing, dry film photo-resist being used for the adhering of the row and the base. Ion milling or reactive ion etching (RIE) can be used as the dry etching method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.