Method for removing dust
US6287528A · kind A · utility
4Cited by
6References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 22, 1999 |
| Grant date | Sep 11, 2001 |
| Priority date | — |
| Expiry date | Oct 22, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S423/06
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method for removing combustible, metallurgical dust out of the exhaust gas from installations for drawing single silicon crystals is provided. The dust contaminated exhaust gas and a reactive gas, such as air, oxygen or ozone, are fed into a reactor operated at a temperature of 50 to 500.degree. C. where the reactive gas combusts the dust to form solid products. The reactor may be equipped with a catalyst, such as nickel, palladium or platinum, to promote the reaction. The solid products-containing exhaust gas is passed through a filter. By combusting the dust in the reactor, spontaneous explosions can be minimized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.