Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same
US6287899A · kind A · utility
118Cited by
5References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 29, 1999 |
| Grant date | Sep 11, 2001 |
| Priority date | — |
| Expiry date | Dec 29, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a thin film transistor array panel for a liquid crystal display is disclosed. The present invention enables to manufacture a thin film transistor array panel in lesser steps than the conventional method by fabricating certain film layers on the panel in one photolithography process. For this purpose, a mask that has parts of different light transmittance is used to fabricate multiple film layers in one photolithography process. The method according to the present invention can increase the productivity and yield by reducing the number of photolithography steps, which are expensive and time consuming.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.