Patent · US Expired

Light modulation element, array-type light modulation element, and flat-panel display unit

US6288829A · kind A · utility

68Cited by
5References
47Claims
0Family size

Assignee

Inventor

Key dates

Filing dateOct 5, 1999
Grant dateSep 11, 2001
Priority date
Expiry dateOct 5, 2019

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/02
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A light modulation element which has a transparent substrate 111 transparent for modulated light, a moving grid 114 comprising a plurality of slits 113 formed by arranging a plurality of grid plates 112 each having a shield property and spaced from each other, the moving grid 114 having at least a part having electrical conductivity, elastic support members for placing the moving grid 114 with a predetermined spacing on the transparent substrate 111 and supporting the moving grid 114 movably in an arrangement direction of the grid plates 112, shield films 119 formed at the positions of the transparent substrate 111 overlapping the slit positions of the moving grid 114, and moving grid move means for moving the moving grid 114 in the arrangement direction of the grid plates 112 by an electrostatic force generated by applying predetermined drive voltages to fixed electrodes placed on the transparent substrate 111 and the moving grid 114.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.