Process and apparatus for the treatment of perfluorinated and hydrofluorocarbon gases for the purpose of destroying them
US6290918A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1999 |
| Grant date | Sep 18, 2001 |
| Priority date | — |
| Expiry date | Jul 2, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus for the treatment of perfluorinated and/or hydrofluorocarbon gases, for the purpose of destroying them, is provided. The apparatus includes at least one high-frequency surface-wave exciter which produces surface waves, a waveguide designed to guide the surface waves produced by the at least one wave exciter to at least one hollow dielectric tube for (i) creating, when supplied with a carrier gas an atmospheric-pressure plasma and (ii) for dissociating the molecules of the perfluorinated and/or hydrofluorocarbon gases within the plasma in order to form reactive compounds, and at least one treatment unit for the reactive fluorinated compounds which is arranged on an exit side of a corresponding hollow dielectric tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.