Slit valve with safety detect device
US6291814A · kind A · utility
7Cited by
1References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 4, 1999 |
| Grant date | Sep 18, 2001 |
| Priority date | — |
| Expiry date | Jun 4, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A slit valve with safety detect device to prevent clipping, used to reduce the wafer damaged by the slit valve of the seal plate, further to have the function of the safety interlock and cost down the production. This invention mainly includes a plurality of sensor to detect that whether something in the range of the seal plate moving or not. The sensor consisted of an emitter and a receiver for detecting. If there are something in the range, the moving seal plate will stop moving, avoid the wafer damaged by the seal plate and to cost down.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.