Pulse pipe refrigerating machine and cryopump using the refrigerating machine
US6293109A · kind A · utility
4Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2000 |
| Grant date | Sep 25, 2001 |
| Priority date | — |
| Expiry date | Feb 11, 2020 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25B9/006
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A pulse tube refrigerator which enables holding a cooling temperature without the use of a heater and the like. The pulse tube refrigerator employs a working gas which has a liquefying temperature within the range of an operating temperature of the pulse tube refrigerator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.