Device for applying photoresist to a base body surface
US6294020A · kind A · utility
3Cited by
11References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 1999 |
| Grant date | Sep 25, 2001 |
| Priority date | — |
| Expiry date | Feb 19, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05B13/0442
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An applicator device for applying photoresist to a surface of a base body having a receiving device therefor, including a photoresist feeder movable relative to the base body, the feeder being a point source device, and a device for performing a defined movement of the base body, comprising a conically shaped tip formed on the point source device for applying photoresist in a defined spot.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.