Patent · US Expired

Device for applying photoresist to a base body surface

US6294020A · kind A · utility

3Cited by
11References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 19, 1999
Grant dateSep 25, 2001
Priority date
Expiry dateFeb 19, 2019

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB05B13/0442
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

An applicator device for applying photoresist to a surface of a base body having a receiving device therefor, including a photoresist feeder movable relative to the base body, the feeder being a point source device, and a device for performing a defined movement of the base body, comprising a conically shaped tip formed on the point source device for applying photoresist in a defined spot.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.