Multiple detecting apparatus for physical phenomenon and/or chemical phenomenon
US6294133A · kind A · utility
73Cited by
10References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 1999 |
| Grant date | Sep 25, 2001 |
| Priority date | — |
| Expiry date | Jan 12, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F99/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detector assembly for detecting a plurality of different properties at the same location at the same time is provided by integrating onto a single semiconductor substrate a first detector unit for measuring a first property and a second detector unit for measuring a second property. The first and second detector units can share, for example, a common element, such as a sensor device that can provide electrical output signals representative of, respectively, the first property and the second property. The common element can include a diaphragm with a pyroelectric element to provide a measurement of temperature and pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.