Ramp rate limiter to control stress during ramping
US6294394A · kind A · utility
20Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 1, 1999 |
| Grant date | Sep 25, 2001 |
| Priority date | — |
| Expiry date | Jul 1, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention includes a method and system for limiting the ramp rate of a variable under control in order to control stress in a process or plant under control. The present invention takes a limit curve provided by the user and combines that limit curve with a scale factor curve obtained from a model of the system to produce an allowable limit curve. A ramp rate limiter then uses the allowable limit curve to control the ramp rate of the variable under control such that the ramp rate of the variable under control is able to achieve the maximum allowable limit but no more.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.