Integrated thin-film solar battery
US6294722A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2000 |
| Grant date | Sep 25, 2001 |
| Priority date | — |
| Expiry date | Feb 23, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/52
Abstract
A sputtering-deposition method usable in forming on an insulator substrate a film including a conductive layer includes the steps of: preparing a conductive substrate holder in the form of a frame having an opening at its central area and electrically grounded; positioning the insulator substrate to cover the opening of the holder; arranging a flexible spacer on a peripheral edge of the substrate and also superposing a back plate on the spacer to press the substrate against the holder via the spacer; pressing and fixing the back plate to the holder; and then sputtering a separately provided target to deposit a new layer on a region of the substrate exposed in the holder's opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.