Sensor system and manufacturing process as well as self-testing process

US6294787A · kind A · utility

Assignees

• Heimann Optoelectronics GmbH · DE
• Robert Bosch GmbH · DE

Inventors

• Jörg Schieferdecker · Dresden, DE
• Marion Simon · Schlangenbad, DE
• Karlheinz Storck · Lorch, DE
• Manfred Rothley · Gondelsheim, DE
• Erich Zabler · Blankenloch, DE
• Rolf Jähne · Dresden, DE

Key dates

• Filing date: Aug 13, 1998
• Grant date: Sep 25, 2001
• Expiry date: Aug 13, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J5/064
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Presented is a sensor system for the detection of thermal radiation, with a substrate (15) and several sensor elements (10) on the substrate (15), in which case at least one self-test device (53) is provided in order to generate heat which can be used for the heating of one or more sensor elements (10). The sensor elements (10) can be heated according to a typical time pattern during the self-testing process. Also presented is an advantageous process for the manufacture of the sensor system as well as an advantageous configuration of the total system, including signal processing.