Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer
US6295130A · kind A · utility
85Cited by
5References
19Claims
0Family size
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Key dates
| Filing date | Dec 22, 1999 |
| Grant date | Sep 25, 2001 |
| Priority date | — |
| Expiry date | Dec 22, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanically tunable Fabry-Perot spectrophotometer is provided for color sensing. Optical fiber provides light input to a Fabry-Perot filter which is adjusted by a switched capacitor circuit. Spectral intensity is sensed by an integrated photodetector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.