Analysis system and method for water-soluble contaminants in a cleanroom environment
US6295864A · kind A · utility
31Cited by
9References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 26, 1999 |
| Grant date | Oct 2, 2001 |
| Priority date | — |
| Expiry date | Jan 26, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An analysis system and method for a cleanroom environment is disclosed wherein on-line testing of water-soluble contaminants is performed by condensing water vapor from an air sample taken from the clean room. The condenser is connected to a analyzing unit that is used to measure and analyze the water-soluble contaminants in the condensed water received from the condensing unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.