Plasma treatment apparatus and method for operation same
US6296735A · kind A · utility
40Cited by
11References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 23, 1998 |
| Grant date | Oct 2, 2001 |
| Priority date | — |
| Expiry date | Oct 23, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for plasma treating workpieces in vacuum comprises a stack of plasma chambers (20). Handling of workpieces to and from the plasma chambers of the stack is performed in parellelism by one handling device and through lateral handling openings of the plasma chambers. The handling device is rotatable around an axis parallel to the handling openings of the plasma chambers and comprises transport means simultaneously movable radially with respect to the axis of rotation towards and from the handling openings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.