Patent · US Expired

Process for the application of a transparent metal oxide layer on a film

US6296895A · kind A · utility

2Cited by

7References

8Claims

0Family size

Assignee

Balzers und Leybold Duetschland Holding AG · DE

Inventors

Gerhard Steiniger · Ronneburg, DE
Rainer Ludwig · Bitburg, DE
Gerd Hoffmann · Bruchköbel, DE

Key dates

Filing date	May 1, 1995
Grant date	Oct 2, 2001
Priority date	—
Expiry date	May 1, 2015

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/562
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A pure metal is vaporized in a receiver, and a quantity of oxygen slightly substoichiometric for the oxide is introduced. To determine the thickness of the layer deposited on the film and to control the vaporization rate, optical sensors are installed in an area where the layer, because of the presence of unoxidized metal, has sufficient absorption for optical measurement. After the determination of the transparency by the sensors, the layer is subjected to a secondary oxidation process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.