Method for highly compact vertical cavity surface emitting lasers
US6297068A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 31, 1999 |
| Grant date | Oct 2, 2001 |
| Priority date | — |
| Expiry date | Mar 31, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/423
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a method for making highly compact vertical cavity surface emitting laser by a lateral oxidation process. Specifically, the present invention allows for the use of well-controlled oxidized regions to bound and to define the aperture of a laser structure in a current controlling oxidation layer, wherein the aperture comprises a conductive region in the oxidation layer. These oxidized regions are formed by the use of a pre-defined bordering pattern of cavities etched in the laser structure, which allow the embedded oxidation layer to be oxidized, and which results in a highly reproducible and manufacturable process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.