Method and apparatus for force control of a scanning probe
US6297502A · kind A · utility
17Cited by
4References
6Claims
0Family size
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Inventors
Key dates
| Filing date | Feb 26, 1999 |
| Grant date | Oct 2, 2001 |
| Priority date | — |
| Expiry date | Feb 26, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/865
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for controlling a force acting on a scanning probe of a cantilever by setting bandwidth of a feedback loop constituted by detecting minute displacement of the cantilever and controlling a force of the scanning probe to be greater than a primary resonant frequency of the cantilever.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.