High frequency infrared emitter
US6297511A · kind A · utility
87Cited by
6References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 1, 1999 |
| Grant date | Oct 2, 2001 |
| Priority date | — |
| Expiry date | Apr 1, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/53
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An infrared radiation emitter is provided that is capable of producing infrared radiation modulating at high frequency. The IR emitter includes a low-thermal-mass resistive membrane that is suspended by long thermal isolation arms over a substrate. The membrane is suspended over the substrate such that a resonant emitting cavity is formed between the membrane and the substrate. The low-mass, thermally isolated membrane design maximizes the temperature change induced by Joule heating of the resistive membrane and allows the emitted IR radiation to be modulated at high frequencies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.