Device for exciting a gas by a surface wave plasma
US6298806A · kind A · utility
14Cited by
3References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 29, 2000 |
| Grant date | Oct 9, 2001 |
| Priority date | — |
| Expiry date | Feb 29, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention concerns a device for exciting a gas comprising a hollow structure (24) forming a waveguide to be connected to a microwave generator and means for circulating a gas through the structure. The gas circulating means comprise an assembly of at least two hollow tubes (46, 48) made of dielectric material respectively passing through said structure (24) in the zones wherein the amplitude of the electric field associated with the incident wave is substantially the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.