Apparatus and method for laser scribing a coated substrate
US6300593A · kind A · utility
113Cited by
5References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 7, 1999 |
| Grant date | Oct 9, 2001 |
| Priority date | — |
| Expiry date | Dec 7, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F19/20
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Apparatus (20) and a method for laser scribing a coated substrate (22) utilizes a rotating polygonal mirror (36) to split a pulsed laser beam (30) in order to provide spaced ablations (34) in a coating (26) on the substrate. The laser pulses are directed through at least one lens (56, 60) and may be passed through fiber optics (62). A laser detector (68) may be used to detect the rotational position of the rotating polygonal mirror (36). A controller (76", 76'") allows a second set of scribes to be generated with reference to the first set of scribes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.