Structure for an optical switch on a silicon on insulator substrate
US6300665A · kind A · utility
53Cited by
2References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2000 |
| Grant date | Oct 9, 2001 |
| Priority date | — |
| Expiry date | Sep 28, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Optical cross-connect systems involve the general concept of a two dimensional array of MEMS tilt mirrors being used to direct light coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two dimensional array can tilt about two non-colinear axes and is suspended by a plurality of suspension arms attached to a silicon on insulator substrate
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.