Patent · US Expired

Gate valve

US6302372A · kind A · utility

14Cited by

9References

10Claims

0Family size

Assignee

Beybold Systems GmbH · DE

Inventors

Andreas Sauer · Großostheim, DE
Manfred Schuhmacher · Alzenau, DE
Johannes Kunz · Hasselroth, DE
Gerhard Joos · Großostheim, DE

Key dates

Filing date	Dec 6, 1999
Grant date	Oct 16, 2001
Priority date	—
Expiry date	Dec 6, 2019

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/568
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A gate valve (1) is constructed for the simultaneous blocking or clearing of two rectangular passage openings (8,9) of two chamber walls (4,5) that are provided between two vacuum chambers (1,3) and aligned with one another. To this end, it has two valve plates (20, 21), which are a component of a slider (15), which is situated so that it can move with play from a position clearing the passage openings (8,9) to a position which closes the passage openings (8,9). To move the valve plates (20,21) to the closing setting against the passage openings (8,9) on the slider (15), at least one lifting element (24), which is acted on by pressure, is provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.