Patent · US Expired

Bi-stable micro switch

US6303885A · kind A · utility

71Cited by
10References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 3, 2000
Grant dateOct 16, 2001
Priority date
Expiry dateMar 3, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01H2001/0042
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A bi-stable micro-machined electromechanical system ("MEMS") switch. In a preferred embodiment, the bi-stable MEMS switch is used in an N.times.N optical signal switching system. Spring arms act in conjunction with a hollow beam portion of a movable center body of the switch to accommodate strain in the arms as the switch is moved from a first position to a second position, thus avoiding buckling of the spring arms. Both the first and second switch position occur at local minimums of mechanical potential energy, thus providing two stable switch states. The center body is moved in relation to static portions of the switch by an actuator, such as an electro-static comb drive.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.