Apparatus and method for processing
US6303902A · kind A · utility
2Cited by
11References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 23, 1998 |
| Grant date | Oct 16, 2001 |
| Priority date | — |
| Expiry date | Dec 23, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/4644
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A holding member is set, which sucks at a contact face, only a part of the periphery of a process area of a sheet-like article to hold the article. The holding member and the sheet-like article are moved relatively in such manner that the contact face is not physically in touch with an already processed area while the contact face maintains its suction to the sheet-like article. A deformation of the already processed area or a mixture of foreign articles to the already processed area can be prevented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.