Method and apparatus for operating a microacoustic sensor array
US6304021A · kind A · utility
7Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 8, 2000 |
| Grant date | Oct 16, 2001 |
| Priority date | — |
| Expiry date | Jun 8, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/102
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus are proposed for operating a microacoustic sensor arrangement, for example, to determine the physical characteristics of a measurement medium. Acoustic surface waves with predetermined wave modes are generated and detected by electroacoustic transducers (6) and a measurement for the physical characteristics of the measurement medium is determined from their propagation behavior along a propagation path. In addition, a sagittally polarized surface wave is generated in the area of the surface of the substrate (5; 22) on which the measurement medium is located.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.