Inorganic permeation layer for micro-electric device
US6306348A · kind A · utility
31Cited by
5References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 15, 1999 |
| Grant date | Oct 23, 2001 |
| Priority date | — |
| Expiry date | Jul 15, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/14
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention pertains to a method of, and a device created by, depositing an inorganic permeation layer on a micro-electronic device for molecular biological reactions. The permeation layer is preferably sol-gel. The sol-gel permeation layer can be created with pre-defined porosity, pore size distribution, pore morphology, and surface area. The sol-gel permeation layer may also function as the attachment layer of the micro-electric device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.