Device scanning in a raster mode, with compensation of disturbing effects of mechanical vibrations on the scanning process
US6308557A · kind A · utility
2Cited by
2References
14Claims
0Family size
Inventor
Key dates
| Filing date | Dec 9, 1998 |
| Grant date | Oct 30, 2001 |
| Priority date | — |
| Expiry date | Dec 9, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device which scans in a raster mode, in particular to a raster microscope, provides a rapid and inexpensive compensation of the disturbing effects of mechanical vibrations on the scanning process. The device includes a sensor for sensing mechanical vibrations and driving a filter whose output, together with the output of the device for the production of a z-signal, is connected to an adder, the output of which drives the device for changing the distance between the specimen and the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.