Patent · US Expired

Vapor deposition apparatus

US6309466A · kind A · utility

1Cited by

6References

14Claims

0Family size

Assignee

Leybold Systems GmbH · DE

Inventors

Gunter Klemm · Nidda, DE
Hans Neudert · Alzenau, DE

Key dates

Filing date	Feb 17, 2000
Grant date	Oct 30, 2001
Priority date	—
Expiry date	Feb 17, 2020

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/042
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method and apparatus for vapor depositing a release agent on a foil. The foil is wrapped around a cylindrical drum which is made of a porous material. The hollow inside of the drum forms a vapor space. The outer surface of the drum includes a thin metallic layer which has engraved or etched therein a pattern of surface passages. A vaporizer vessel provides a vaporized release agent which is conducted to the vapor space inside the drum. The release agent travels through the circumferential passages so as to be deposited in a pattern on the foil which is wrapped around the drum. A conforming body covers the circumferential surface not covered by the foil and can be heated to heat the drum.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.