Method of fabricating an optical integrated circuit
US6309904A · kind A · utility
4Cited by
11References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 1999 |
| Grant date | Oct 30, 2001 |
| Priority date | — |
| Expiry date | Jun 24, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of fabricating an optical integrated circuit comprising at least one etched and buried BRS waveguide coupled to at least one etched but not buried ridge waveguide includes defining an imprint for the two types of guide beforehand, using a common mask, and then defining the two types of guide by successive etching operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.