Fluorinated solvent compositions containing hydrogen fluoride
US6310018A · kind A · utility
62Cited by
11References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2000 |
| Grant date | Oct 30, 2001 |
| Priority date | — |
| Expiry date | Mar 31, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and a co-solvent, and the use of these compositions for cleaning and etching of substrates is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.