Patent · US Expired

Media compatible pressure sensor

US6311561A · kind A · utility

85Cited by
44References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 1, 1999
Grant dateNov 6, 2001
Priority date
Expiry dateFeb 1, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/48227
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A media compatible package for a pressure sensing device is made from a non-corrosive, highly chemical resistant material. The package includes a base which holds a printed circuit board having a pressure sensor mounted thereon. A sealing member is placed on the circuit board encircling the pressure sensor and a diaphragm is disposed on the sealing member. A fluid port is attached to the base and compressingly engages the diaphragm creating a sealed chamber around the pressure sensor. The sealed chamber is filled with a pressure transmissive fluid such as oil through a fill hole provided in the printed circuit board. This configuration allows the sensor package to be easily assembled with ordinary components and provides a design where all exposed surfaces of the package can be made from a highly corrosion resistive material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.